Model
|
TGVSA Series (DN100 / 125 / 160) |
| Leak Rate (Body, Valve Seat) |
< 1 x 10-9 mbar.liter/sec |
|
Pressure Range
|
1 x 10-9 mbar to 1.6 bar |
| Differential Press at Opening |
≤ 20 mbar |
|
Lifetime (Cycles)
|
> 100,000
|
| Body Temperature |
≤ 200 °C |
| Diff. Temperature (Body/Gate) |
≤ 80 °C |
|
Materials - Body
|
SUS 304 (EP) |
|
Materials - Cylinder & Piston
|
SUS 304 / Aluminum
|
| Valve Position Indicating |
LED display by magnet sensor |
|
Operating Air
|
5-8 Kgf/㎠ |
|
Weight
|
DN100 - 8KG, DN125 - 10KG, DN160 - 12KG
|
|
Field Installation
|
Samsung & Hynix Semiconductors 300 mmFAB |
