Model
|
TGVM Series (DN 25 ~ 160)
|
| Leak Rate (Body, Valve Seat) |
< 1 x 10-9 mbar.liter/sec
|
| Pressure Range
|
1 x 10-9 mbar to 1.6 bar |
| Differential Press at Opening |
≤ 20 mbar |
| Lifetime (Cycles)
|
> 100,000
|
| Body Temperature |
≤ 200 °C |
| Diff. Temperature (Body/Gate) |
≤ 80 °C |
Materials - Body & Mechanism
|
SUS 304 (EP) |
Materials - Handle part |
SUS 304 / Aluminum
|
Valve Position Indicating
|
Visual (Mechanical Indicator) |
| Weight
|
DN100 - 9KG, DN125 - 12KG, DN160 - 15KG |
| Field Installation
|
Samsung & Hynix semiconductors, Vacuum Equipment Manuafacturers
|
